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  • BSI
    BS EN ISO 14644-13:2026 - TC Tracked Changes. Cleanrooms and associated controlled environments - Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration
    Edition: 2026
    $695.28
    / user per year

Description of BS EN ISO 14644-13:2026 - TC 2026

This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels. The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10. The document gives general guidance on the following: expected surface cleanliness levels; suitability of cleaning methods; compatibility of surfaces with the cleaning technique; assessment of cleaning appropriateness. The following are excluded from this document: classification of cleaning methods; product produced within a cleanroom; specific surface-related cleaning methods; detailed description of cleaning mechanisms, methods and procedures of various cleaning methods; detailed material characteristics; description of damage mechanisms by cleaning processes and time-dependent effects; references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent; other characteristics of particles such as electrostatic charge, ionic charges, etc.; chemical reactions between molecular contaminants and surfaces; microbiological aspects of surface cleanliness; radioactive aspects of contamination; health and safety considerations; environmental aspects such as waste disposal, emissions, etc.; selection and use of statistical methods.

Standard NumberBS EN ISO 14644-13:2026 - TC
TitleTracked Changes. Cleanrooms and associated controlled environments - Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration
StatusDefinitive
Publication Date2026-03-25
DescriptorsAlgorithms, Mathematical calculations, Sample location, Samples, Sampling methods, Particle size distribution, Statistical methods of analysis, Environmental cleanliness, Clean rooms, Test equipment, Concentration, Designations, Classification systems, Particulate air pollutants, Outliers, Sequential sampling, Conformity
ICS13.040.35 Cleanrooms and associated controlled environments
CommitteeLBI/30
ISBN978 0 539 41621 3
PublisherBSI
Pages108



About BSI

BSI Group, also known as the British Standards Institution is the national standards body of the United Kingdom. BSI produces technical standards on a wide range of products and services and also supplies certification and standards-related services to businesses.
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